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Helen Green's answer to How do you make a sputtering target? - Quora

submitted 1 month ago, Monday, Oct 15, 2018, 20:18:34 by julissa.zhang in Reference & Education
Simply speaking, here are two main ways to make a sputtering target.

One is casting. The alloy raw material of a certain distribution ratio is melted, and the alloy solution is poured into a mold to form an ingot, and finally a target material is machined, and the casting method is smelted and cast in a vacuum.

The other is powder metallurgy. The alloy material which has a certain distribution ratio is melted, cast into an ingot and then pulverized, and the powder formed by pulverization is isostatically pressed and then sintered at a high temperature to finally form a target.
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